The bar pattern chip offers a good alternative for ndirect methods to evaluate spatial resolution in high res X-ray imaging modalities. The phantom comprises two silicon chips, one orientated in plane and one perpendicular (axial) orientated to it. The phantom is available with chips placed in a full resin cylinder or fixed on a slim support in a hollow (airfilled) cylinder (both machined with high mechanical accuracy).
The 5 x 5 mm² chip contains bar (trenches) and point pattern with diameters from 5 to 150 µm line/point thickness.
The depth of the structures varies between 80 and 120 µm.
The different structures on the chip are arranged in such a way over the chip, that spatial resolution can be evaluated in the center as well as in the periphery of the image/chip in a single measurement.